Varian SH-110 Dry Scroll Pump

The Varian SH-110 is a dry, hermetic scroll pump that provides industry-leading features designed for easy integration into original-equipment manufacturer (OEM) systems. This single-stage pump produces a pumping speed of 110 L/m (on 60 Hz power) and achieves an ultimate pressure of 50 mtorr (0.07 mbar) in a compact package that is also ideally suited to end-user applications. The SH-110 pump conforms with CE, CSA, and Semi S2-0200 requirements.